د.محمد فتحى
03-22-2010, 04:09 PM
Thin film preparation techniques
Film synthesis techniques used in the laboratory are based in physical or chemical vapor deposition of thin films (’physical vapour deposition’ or PVD (http://www.icmm.csic.es/fis/english/pvd.html) and ’chemical vapour deposition’ or CVD (http://www.icmm.csic.es/fis/english/cvd.html), respectively). In both cases, the techniques are based in the formation of vapor of the material to be deposited, so that the vapor is condensed on the substrate surface as a thin film. Usually the process must be performed in vacuum or in controlled atmosphere, to avoid interaction between vapor and air.
Process diagram
http://www.icmm.csic.es/fis/g/preparacion_in.gif
In physical techniques (PVD) (http://www.icmm.csic.es/fis/english/pvd.html) we part from a solid material converted to vapor through heating
(evaporation) or energetic ion bombardment. The material in form of vapor finally condeses on the substrate surface as a thin film.
In chemical techniques (CVD) (http://www.icmm.csic.es/fis/english/cvd.html) we part directly from gases (sometimes vapor originating from a liquid phase) which react and give place to a new product that condenses as a thin film on the substrate.
Other film synthesis techniques include high temperature thermal oxidation and anodic oxidation
.
منقول والترجمه قريبا ان شاء الله
Film synthesis techniques used in the laboratory are based in physical or chemical vapor deposition of thin films (’physical vapour deposition’ or PVD (http://www.icmm.csic.es/fis/english/pvd.html) and ’chemical vapour deposition’ or CVD (http://www.icmm.csic.es/fis/english/cvd.html), respectively). In both cases, the techniques are based in the formation of vapor of the material to be deposited, so that the vapor is condensed on the substrate surface as a thin film. Usually the process must be performed in vacuum or in controlled atmosphere, to avoid interaction between vapor and air.
Process diagram
http://www.icmm.csic.es/fis/g/preparacion_in.gif
In physical techniques (PVD) (http://www.icmm.csic.es/fis/english/pvd.html) we part from a solid material converted to vapor through heating
(evaporation) or energetic ion bombardment. The material in form of vapor finally condeses on the substrate surface as a thin film.
In chemical techniques (CVD) (http://www.icmm.csic.es/fis/english/cvd.html) we part directly from gases (sometimes vapor originating from a liquid phase) which react and give place to a new product that condenses as a thin film on the substrate.
Other film synthesis techniques include high temperature thermal oxidation and anodic oxidation
.
منقول والترجمه قريبا ان شاء الله